Differential resonant MEMS accelerometer: Synchronization characteristics of weakly coupled microbeam sensing elements

This work is devoted to studying the conditions and scenarios for synchronizing oscillations of weakly coupled microbeam elements a differential resonant MEMS accelerometer operating in dual-loop self-oscillator mode. The model system two Van der Pol self-oscillators with nonlinear elastic coupling between moving elements, obtained using Galerkin method, was studied multiscale method. modes beats synchronization resonators are found analytically numerically, boundary these space parameters determined. Along local bifurcation analysis considered stationary regimes, global evolution branching limit cycles slow variables also carried out, which made it possible detect zones coexistence stable beat regimes their basins attraction. influence factor designed or technologically determined non-identity design on location parametric studied.